Virtual production areas in MIET

Specialists of the Institute of Digital Design and the Advanced Engineering Schools laboratory "Cyberphysical Prototyping of Special Technological Equipment" developed virtual high-tech production areas called "Photolithography" and "Ion Implantation", that were designed using VR hardware and software.

The software systems include interactive virtual complexes of photolithography and ion implantation process areas, as well as interactive cyber-physical models of equipment, providing real-time simulation of technological processes.

The "Photolithography" includes a track for application and development of photoresist (with simulation of two different processes on one unit), a photolithography scanner, a unit for control of topological layer misalignment, an electron microscope for control of linear dimensions, and an optical (visual) wafer inspection unit.

The "Ion Implantation" includes models of ion implantation complex, rapid thermal annealing unit, flaw detector, dose control unit, and introduced defectivity control unit.

The virtual complexes has several working modes: virtual excursion, interactive study of equipment and technological processes in real time, independent work at virtual production sites in real time.

The virtual complexes became part of the educational programmes of the MIET Advanced Engineering Schools during the training of Master's program 11.04.03 "Design and technology of electronic tools", Bachelor programme "Technological equipment for the production of microelectronics and microsystems engineering products", as well as of disciplines "Basic processes and technologies of microelectronics" and "Methods and means of research and optimization of thermal processes and equipment". They are also used in the program 11.02.13 "Solid State Electronics" (qualification "Technician") in the College of Electronics and Computer Science of MIET.