Brief biography
1981 – Graduated from MIET.
Since 1984 – Worked at MIET.
1994 – Candidate of Science Engineering.
2004 - Doctor of Science Engineering.
Since 2005 – Director of the Institute of Nano and Microsystem Technology.
Since 2007 – Professor.
2007 – Laureate of the Prize of the Government of the Russian Federation.
Courses
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Microelectromechanical systems
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Physico-chemical bases of silicon structures on the insulator
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Electronic Parts
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Technology of parts and components for EMU
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Microsystem Technology Components
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Sensors
Scientific activity
Directions of research and development:
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Technology and equipment for the production of semiconductors, materials and devices of micro- and nanoelectronics, microsystem technology.
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Development of designs and manufacturing techniques for small-sized linear acceleration converters (microaccelerometers), angular velocity (microgyroscopes), inclinometers, microturn mirrors, positioning systems and elements of navigation blocks, inertial information blocks based on silicon sensitive elements.
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The study of the physicochemical processes of chemical, plasma-chemical etching of microelectronic materials, the processes of fusion and formation of multilayer, complex structures for microelectronics and microsystem technology.
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Research and development of basic and technological processes for the manufacture of SOI structures and sensitive elements (SE) of sensors of physical quantities.
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Development of manufacturing and assembly technology for CE MEMS.
Author of 180 printed works, including 4 teaching aids, 10 patents and applications.