Born in 1973, graduated from MIET in 1996.
1995-2002 – Worked at Angstrem OJSC as an etcher of precision etching, an engineer.
2002-2003 – Senior researcher at Optolink LLC.
2001 – Defended his thesis for the degree of Candidate of Science engineering, major 05.27.06.
2008 – Defended his thesis for the degree of Doctor of Science engineering, major 05.27.06.
Since 2007 – Associate Professor at MIET.
Since 2009 – Professor at MIET.
Technological and protective environments ES
Physicochemical fundamentals of ES technology
History and Methodology of Science
Areas of scientific interest:
He is the head and responsible executor of a number of R&D performed at the Institute of Nano and Microsystem Technology.
The main areas of scientific activity are:
development of the scientific basis for the creation of complex multi-layer structures of SOI using glassy materials for elements of micromechanics and IP;
development of a set of technological solutions in the field of microsystem technology and the creation of angular velocity sensors, acceleration sensors, microturn mirrors and other MEMS.
2003, 2006 – Winner of a competition for a grant from the President of the Russian Federation to support young Russian candidates of science.
2009, 2012 – Winner of the competition for a grant from the President of the Russian Federation to support young Russian scientists, doctors of sciences.
Co-author of 10 patents. Author and co-author of more than 160 publications, 7 teaching aids.