Boyko Anton Nikolaevich Candidate of Science Engineering, Associate Professor

Brief biography

2001 – Kabardino-Balkarian State University named after H.M. Berbekova, Master of Engineering and Technology in the field of Electronics and Microelectronics, dissertation topic: “The effect of irradiation with low-energy ions on the surface composition of Pb-In single crystals”.

2006 – MIET, Candidate of Science engineering, major 05.27.06 - Technology and equipment for the production of semiconductors, materials and devices of electronic equipment, on "Design and technological features of the manufacture of microelectromechanical devices of the torsion type".

Achievements

2012/2013 – Grant to support research in the framework of the federal target program "Scientific and scientific-pedagogical personnel of innovative Russia" for 2009-2013.

2010/2011 – Grant for joint research with the Institute of Electronic Nanosystems Fraunhofer ENAS (Germany) with the support of the Russian-German program “Mikhail Lomonosov-II”.

2008 – Grant of the President of the Russian Federation to support young Russian scientists - candidates of sciences.

Courses

  • Micro- and nanotechnologies for the production of electronic devices

  • Fundamentals of Microelectronics Technology

  • Design engineering and production technology of LSI and VLSI

Scientific activity

Scientific work experience: research and development in the field of microsystem technology.

Sphere of scientific interests: technologies of sealing and control of the tightness of microsystems, getter materials for microsystems, functional nanomaterials.

Key scientific achievements:

  • Development of the design of a device for monitoring the tightness of microstructures in a group way

  • Study of gas absorption materials based on Ti-V and porous silicon

  • Study of nanofunctional materials based on porous silicon

Author and co-author of more than 50 scientific publications, including 2 teaching aids and 6 patents.